Test of Opticlean strip coating material for removing surface contamination
2000 (English)In: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 39, no 16, 2737-2739 p.Article in journal (Refereed) Published
The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1-5-mu m-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He-Ne laser light as low as a few ppm (parts in 106), corresponding to a surface roughness of <1 Angstrom rms.
Place, publisher, year, edition, pages
2000. Vol. 39, no 16, 2737-2739 p.
Strip coating materials, Contamination; Silicon wafers; Surface chemistry; Surface roughness, Materials science
IdentifiersURN: urn:nbn:se:hig:diva-23219DOI: 10.1364/AO.39.002737ISI: 000087311100030ScopusID: 2-s2.0-0038492446OAI: oai:DiVA.org:hig-23219DiVA: diva2:1062367