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Interface roughness statistics of thin films from angle-resolved light scattering at three wavelengths
Department of Technology, Uppsala University, Uppsala, Sweden; Max-Planck-Institut für , Stuttgart, Germany.ORCID iD: 0000-0003-2887-049X
1998 (English)In: Optical Engineering: The Journal of SPIE, ISSN 0091-3286, E-ISSN 1560-2303, Vol. 37, no 2, 696-704 p.Article in journal (Refereed) Published
Abstract [en]

The possibility of determining interface roughness and cross-correlation statistics of the two interfaces of a thin film from angle-resolved light scattering data at three wavelengths is investigated. It is shown that angle-resolved light scattering measurements at three wavelengths are not sufficient to determine the three power spectral density functions describing the thin film roughness. An attempt to combine reflectance and transmittance scattering to determine the roughness of a thin film on a transparent substrate appears to work and provides encouraging results.

Place, publisher, year, edition, pages
1998. Vol. 37, no 2, 696-704 p.
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:hig:diva-23230ISI: 000072053600043ScopusID: 2-s2.0-0038613397OAI: oai:DiVA.org:hig-23230DiVA: diva2:1062891
Available from: 2017-01-09 Created: 2017-01-05 Last updated: 2017-01-09Bibliographically approved

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