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Surface Roughness Effects in Ellipsometry: Comparison of Truncated Sphere and Effective Medium Models
Department of Technology, Uppsala University, Uppsala, Sweden.ORCID iD: 0000-0003-2887-049X
Department of Technology, Uppsala University, Uppsala, Sweden.
Department of Technology, Uppsala University, Uppsala, Sweden.
1995 (English)In: Optical materials (Amsterdam), ISSN 0925-3467, E-ISSN 1873-1252, Vol. 4, no 6, 815-821 p.Article in journal (Refereed) Published
Abstract [en]

We investigate the applicability of effective medium models for describing the effects of surface roughness on ellipsometric data. The ellipsometric parameters of a model surface composed of truncated spherical bumps on a substrate were calculated and compared to the Bruggeman effective medium theory. It is possible to fit the model calculations with the Bruggeman theory. However, the thickness and volume fraction of the effective medium layer describing the surface roughness do not correspond to the physical height and volume fraction of the bumps on the model surface.

Place, publisher, year, edition, pages
1995. Vol. 4, no 6, 815-821 p.
Keyword [en]
Approximation theory; Calculations; Effects; Interfaces (materials); Mathematical models; Substrates; Surface roughness; Volume fraction
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:hig:diva-23247DOI: 10.1016/0925-3467(95)00026-7ISI: A1995TM35700020Scopus ID: 2-s2.0-0029387544OAI: oai:DiVA.org:hig-23247DiVA: diva2:1062913
Available from: 2008-10-17 Created: 2017-01-05 Last updated: 2017-01-09Bibliographically approved

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