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Determination of interface roughness cross correlation of thin films from spectroscopic light scattering measurements
Department of Technology, Uppsala University, Uppsala, Sweden.ORCID iD: 0000-0003-2887-049X
1997 (English)In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 81, no 8, 3627-3636 p.Article in journal (Refereed) Published
Abstract [en]

Diffuse reflectance and transmittance spectra collected in different scattering angle intervals have been analyzed in order to determine the interface roughness cross correlation of thin films. Different angle intervals correspond to different roughness length scales; the cross correlation as a function of length scale can hence be determined. Sputter deposited ZrO2 films were analyzed. The transition from correlated to uncorrelated film interfaces was found to occur at longer length scales, when the film thickness increased.

Place, publisher, year, edition, pages
1997. Vol. 81, no 8, 3627-3636 p.
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Physical Sciences
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URN: urn:nbn:se:hig:diva-23231ISI: A1997WV36300043ScopusID: 2-s2.0-0342619549OAI: oai:DiVA.org:hig-23231DiVA: diva2:1062915
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cited By 7

Available from: 2017-01-09 Created: 2017-01-05 Last updated: 2017-01-09Bibliographically approved

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