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  • 1.
    Lindstrom, T
    et al.
    Department of Materials Science, Ångström Laboratory, Uppspla University, Uppsala, Sweden.
    Rönnow, Daniel
    ACREO AB, Kista, Sweden.
    Total integrated scattering from transparent substrates in the infrared region: validity of scalar theory2000In: Optical Engineering: The Journal of SPIE, ISSN 0091-3286, E-ISSN 1560-2303, Vol. 39, no 2, p. 478-487Article in journal (Refereed)
    Abstract [en]

    Integrated light scattering, from thin, transparent silicon wafers with different front and backside surface roughness is investigated. The measurements are made at near normal incidence in the IR wavelength region 5 to 20 μm using an integrating sphere. A method to separate the scattering contribution from each interface for measurements on transparent samples is introduced. Scalar scattering theory is used to calculate the effective root mean square roughness from reflectance and transmittance measurements, and these values are compared to profilometer data, correcting for the different bandwidth limits. Scattering measurements are performed with both the rough and the smooth surface of the wafer oriented toward the light source, which results in additional knowledge. The maximum ratio between the root mean square roughness and the wavelength of the light, to be used in scalar theory, is found to be considerably higher for the transmittance case than for the reflectance case. In agreement with theory, the calculated root mean square roughness is found to be proportional to the refractive index of incident medium in reflectance, and to the difference in refractive indices of incident and refracting medium for the transmittance case.

  • 2.
    Rönnow, Daniel
    Department of Technology, Uppsala University, Uppsala, Sweden; Max-Planck-Institut für , Stuttgart, Germany.
    Interface roughness statistics of thin films from angle-resolved light scattering at three wavelengths1998In: Optical Engineering: The Journal of SPIE, ISSN 0091-3286, E-ISSN 1560-2303, Vol. 37, no 2, p. 696-704Article in journal (Refereed)
    Abstract [en]

    The possibility of determining interface roughness and cross-correlation statistics of the two interfaces of a thin film from angle-resolved light scattering data at three wavelengths is investigated. It is shown that angle-resolved light scattering measurements at three wavelengths are not sufficient to determine the three power spectral density functions describing the thin film roughness. An attempt to combine reflectance and transmittance scattering to determine the roughness of a thin film on a transparent substrate appears to work and provides encouraging results.

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